| パラメーター | 数値 |
|---|---|
| Aperture shape | approximately circular |
| Mirror coating | Al |
| Aperture dimensions | 15mm diameter |
| Number of electrodes | 37 (19) (see Fig. 3) |
| Control voltages Vc | 0 ~ 260 V |
| Initial RMS deviation from plane | less than 0.45 μm |
| Main initial aberration | 1.5 fringes at 630nm |
| Maximum deflection of the mirror center | 9.0 μm |
