エキシマレーザー
エキシマレーザー (4 社)
- GAM LASER, Inc.
- Coherent, Inc.
- LightMachinery Inc.
- MPB Communications Inc.
仕様
| Model | Wavelength (nm) |
Average output (W) |
Pulse duration |
Repetition rate (Hz) |
|---|---|---|---|---|
| EX5IN F2 | 157 | 0.5 1 1.5 |
10 ns | 250 500 750 |
| EX5IN ArF | 193 | 2.4 14 5 |
17-20 ns | 250 500 750 |
| EX5IN KrF | 248 | 4 8 10 |
17-20 ns | 250 500 750 |
| EX5IN XeCl | 308 | 5 9 12 |
17-21 ns | 250 500 750 |
| EX5IN XeF | 351 | 5 9 12 |
17-20 ns | 250 500 750 |
| EX10IN ArF | 193 | 4 7 9 |
15 ns | 300 600 750 |
| EX10IN KrF | 248 | 6 12 18 |
15 ns | 300 600 750 |
| EX10IN XeCl | 308 | 3 6 8 |
15 ns | 300 600 750 |
| EX10IN XeCl | 351 | 3 6 8 |
15 ns | 300 600 750 |
| EX50IN F2 | 157 | 0.5 1 1.5 |
10 ns | 250 500 750 |
| EX50IN ArF | 193 | 5 10 15 |
15-20 ns | 250 500 750 |
| EX50IN KrF | 248 | 10 20 28 |
15-20 ns | 250 500 750 |
| EX50IN XeCl | 308 | 5 9 12 |
15-20 ns | 250 500 750 |
| EX50IN XeF | 351 | 5 9 12 |
15-20 ns | 250 500 750 |
| EX10SE F2 | 157 | - 0.6 1.2 |
12-15 ns | 300 600 1000 |
| EX10SE ArF | 193 | 4 7 |
12-15 ns | 300 600 1000 |
| EX10SE KrF | 248 | - 6 12 |
12-15 ns | 300 600 1000 |
| EX10SE XeCl | 308 | - 3 6 |
12-15 ns | 300 600 1000 |
| EX10SE XeF | 351 | - 3 6 |
12-15 ns | 300 600 1000 |
| EX50 F2 | 157 | - 0.5 1 |
10 ns | 250 500 750 |
| EX50 ArF | 193 | - 5 10 |
17-20 ns | 250 500 750 |
| EX50 KrF | 248 | - 10 20 |
17-20 ns | 250 500 750 |
| EX50 XeCl | 308 | - 5 10 |
17-20 ns | 250 500 750 |
| EX50 XeF | 351 | - 5 9 |
17-20 ns | 250 500 750 |
| EX100 F2 | 157 | 0.5 1 2 |
15-22 ns | 60 125 250 |
| EX100 ArF | 193 | 4 8 16 |
15-22 ns | 60 125 250 |
| EX100 KrF | 248 | 6 12 24 |
15-22 ns | 60 125 250 |
| EX100 XeCl | 308 | 3 6 13 |
15-22 ns | 60 125 250 |
| EX100 XeF | 351 | 3 6 10 |
15-22 ns | 60 125 250 |
| EX350 F2 | 157 | 0.4 0.9 |
20-26 ns | 20 50 |
| EX350 ArF | 193 | 3 7 |
20-26 ns | 20 50 |
| EX350 KrF | 248 | 5 12 |
20-26 ns | 20 50 |
| EX350 XeCl | 308 | 3 6 |
20-26 ns | 20 50 |
| EX350 XeF | 351 | 2 4.5 |
20-26 ns | 20 50 |
| EX10F | 157 | 0.6 0.2 1.9 |
7 ns | 300 600 750 |
| EX50F | 157 | 0.8 1.6 2.8 |
10 ns | 250 500 750 |
| EX100F | 157 | 1.1 2.2 4 |
10 ns | 125 250 500 |
| EX100HF | 157 | 0.8 1.6 3 |
10 ns | 60 125 250 |
| EX50LN F2 | 157 | - - - call |
14-18 ns | 125 250 500 1000 |
| EX50LN ArF | 193.3 | 0.3 0.6 1.5 2.0 |
14-18 ns | 125 250 500 1000 |
| EX50LN KrF | 248.35 | 0.75 1.5 2.5 5.0 |
14-18 ns | 125 250 500 1000 |
| EX50LN XeCl | 308-311 | 0.3 0.5 1.5 2.0 |
14-18 ns | 125 250 500 1000 |
| EX50LN XeF | 351/533 | - | - | - |
| EX10 ArF | 193 | 4 7 9 |
11-15 ns | 300 600 750 |
| EX10 KrF | 248 | 6 12 18 |
11-15 ns | 300 600 750 |
| EX10 XeCl | 308 | 3.5 7 9 |
11-15 ns | 300 600 750 |
| EX10 XeF | 351 | 2 4 6 |
11-15 ns | 300 600 750 |
| Model | Wavelength (nm) |
Average output (W) |
Pulse duration |
Repetition rate (Hz) |
|---|---|---|---|---|
| LAMBDA SX 540C LAMBDA SX 315C LAMBDA SX 300C LAMBDA SX 200C |
308 | 540 315 300 200 |
29 ns 29 ns 29 ns 22 ns |
600 300 300 300 |
| LAMBDA SX 300K LAMBDA SX 200K |
248 | 300 200 |
34 ns 24 ns |
300 |
| LEAP 130K | 248 | 130 | 22±5 ns | 200 |
| LEAP 130C | 308 | 130 | 22±5 ns | 200 |
| LPFpro 205 LPFpro 220 |
157 | 2.5 7 |
15 ns | 50 200 |
| LPFpro 205 LPFpro 220 LPXpro 210 LPXpro 220 LPXpro 240 LPXpro 305 |
193 | 15 40 35 50 24 25 |
15 ns 15 ns 20 ns 20 ns 20 ns 25 ns |
50 200 100 200 300/400 50 |
| LPXpro 210 LPXpro 220 LPXpro 240 LPXpro 305 |
248 | 80 90 80 50 |
20 ns 20 ns 20 ns 25 ns |
100 200 300/400 50 |
| LPXpro 210 LPXpro 220 LPXpro 305 |
308 | 45 50 30 |
20 ns 20 ns 25 ns |
100 200 50 |
| LPXpro 210 LPXpro 220 LPXpro 240 LPXpro 305 |
351 | 35 35 30 15 |
20 ns 20 ns 20 ns 25 ns |
100 200 300/400 50 |
| COMPexPro 50 COMPexPro 102 COMPexPro 110 COMPexPro 201 COMPexPro 205 |
193 | 4 4 12 4 15 |
20 ns 20 ns 20 ns 25 ns 25 ns |
50 20 100 10 50 |
| COMPexPro 50 COMPexPro 102 COMPexPro 110 COMPexPro 201 COMPexPro 205 |
248 | 7 7 30 7 30 |
20 ns 20 ns 20 ns 25 ns 25 ns |
50 20 100 10 50 |
| COMPexPro 102 COMPexPro 110 COMPexPro 201 COMPexPro 205 |
308 | 5 16 4 20 |
20 ns 20 ns 25 ns 25 ns |
20 100 10 50 |
| COMPexPro 102 COMPexPro 110 COMPexPro 201 COMPexPro 205 |
351 | 4 12 3 15 |
20 ns 20 ns 25 ns 25 ns |
20 100 10 50 |
| IndyStar (ArF) | 193 | 8 | 8 ns | 1000 |
| IndyStar (KrF) | 248 | 12 | 8 ns | 1000 |
| ExciStar S-Industorial | 193 | 8 | 1000 | |
| ExciStar S-Industorial | 248 | 12 | 1000 | |
| ExciStar S-Industorial | 308 | 8 | 1000 | |
| ExciStar S-Industorial | 351 | contact | 1000 | |
| BraggStar Industrial (ArF) | 193 | 7 | 1000 | |
| BraggStar Industrial (KrF) | 248 | 10 | 1000 | |
| BraggStar Industrial LN (ArF) | 193 | 0.5 | 1000 | |
| BraggStar Industrial LN (KrF) | 248 | 2 | 1000 | |
| ExciStar XS (F2) | 157 | 0.2/0.5 | 5 ns | 200/500 |
| ExciStar XS (ArF) | 193 | 1.0/2.5 | 5 ns | 200/500 |
| ExciStar XS (KrF) | 248 | 1.6/4.0 | 5 ns | 200/500 |
| ExciStar XS (XeF) | 351 | 0.8/2.0 | 5 ns | 200/500 |
| Xantos XS (F2) | 157 | 0.5 | 5 ns | 500 |
| Xantos XS (ArF) | 193 | 2.5 | 5 ns | 500 |
| Xantos XS (KrF) | 248 | 4 | 5 ns | 500 |
| Xantos XS (XeF) | 351 | 2 | 5 ns | 500 |
| Model | Wavelength (nm) |
Average output (W) |
Pulse duration |
Repetition rate (Hz) |
|---|---|---|---|---|
| LAMBDA SX 540C LAMBDA SX 315C LAMBDA SX 300C LAMBDA SX 200C |
308 | 540 315 300 200 |
29 ns 29 ns 29 ns 22 ns |
600 300 300 300 |
| Model | Wavelength (nm) |
Average output (W) |
Pulse duration |
Repetition rate (Hz) |
|---|---|---|---|---|
| PSX 100 F2 MSX 250 F2 Ximer 300 |
157 | 0.05 0.35 0.27 |
2.5-5.0 ns 10 ns n.m. |
100 100 300 |
| PSX 100 ArF MSX 250 ArF ASX-750 ArF Ximer 300 ArF |
193 | 0.4 2.0 10 1.4 |
2.5-5.0 ns 15 ns 20 ns 4 ns |
1.4k 100 60 300 |
| PSX 100 KrCl | 222 | 0.02 | 2.5-5.0 ns | 100 |
| PSX 100 KrF MSX 250 KrF ASX-750 Krf Ximer 300 KrF |
248 | 0.4 4.0 20 2 |
2.5-5.0 ns 15 ns 26 ns 5 ns |
100 100 60 300 |
| PSX 100 XeCl MSX 250 XeCl ASX-750 Xecl |
308 | 0.15 2.5 15 |
2.5-5.0 ns 12 ns 27 ns |
100 100 60 |
| PSX 100 Xef MSX 250 XeF ASX-750 XeF |
351 | 0.1 3.0 8 |
2.5-5.0 ns 15 ns 20 ns |
100 100 60 |
